Webinar Metrology at Scale: Enabling HVM for Logic, Memory, Sensors, and Silicon Photonics

In this webinar, we will explore the current and future state of semiconductor manufacturing, as well as the metrology and process control required to manufacture logic, memory, sensors, Silicon Photonics, and other devices. We will define the main manufacturing steps and process flow. Then we will introduce in-line metrology techniques, focusing on how each is used, its real applications, challenges, and future developments.

Introduction: The industry (main drivers, including Silicon Photonics) and Nova
General HVM processes (for logic, memory, sensors and Silicon Photonics) and in-line metrology overview. Silicon Photonics process flow example.
Metrology HVM workhorses (scatterometry, CD-SEM/TEM, AFM, X-rays, SIMS), use case examples including future metrology.

Dr. Igor Turovets is a Senior Scientist in the CTO “pathfinding” group at Nova Ltd. Dr. Turovets has been working in semiconductor process and metrology for 30 years, focusing on semiconductor manufacturing, integrated and standalone scatterometry applications, and process control. He is a co-author of multiple patents and publications. Dr. Turovets holds a PhD in Physical Chemistry from Moscow State University. 

• Engineers and scientists in various fields including photonics, optics, materials, electronics, chemistry, mechanics, and more. 

• Students interested in exploring professional opportunities in the Israeli semiconductor industry. 

• Professionals and entrepreneurs seeking collaboration with Nova Ltd. 

Nova is a leading global innovator and key provider of advanced metrology and process control solutions used in semiconductor manufacturing.

Register here >>